MEMS sensors

Our technology platform for micro- and nanotechnologies is very suitable for the manufacturing of various kinds of MEMS devices and sensors.

For example, our CirconFlex sensor platform is a basis for state-of-the-art sensors for measuring:

  • Fow
  • Pressure
  • Temperature
  • Acceleration

Several sensing modes can be combined into one sensor, if required, and opens up a path towards highly miniaturized and integrated devices.

We are able to use either rigid or flexible substrates and even can develop membrane-based sensors.

Making innovation work together with Elesta

Elesta had the innovation challenge which they needed support on how to use the supply chains from 4 different suppliers to 1, in order to develop and process their products.

They are able to create a competitive sustainable challenge in the market by work with us.

Based on the positive experience, Kourosh Amiri Jam mentioned that Philips Innovation Services is a qualified partner in mastering innovation projects.

Watch to video for the full story.

Check out our other MEMS applications

MEMS applications are many. Organ-on-a-chip for example, where a human organ is reproduced in its most elementary form: microelectromechanical systems device. Several applications stand out, because of their promise and our capabilities.

Relevant for you: MEMS & Micro Devices MEMS is our expertise

Sustainable competitive advantage through custom MEMS devices. Check out our services in the MEMS & Micro Devices key area of expertise.

News & events

Projects on ultrasound innovation awarded for future generation microfabrication technologies for ultrasound products and imaging catheters.

Presentation by technologist René Sanders about microfluidic device standardization and manufacturability at the Polymer Replication on Nanoscale conf.

Presentation by Dr. Jos Giesbers, Sr. Development Engineer & Technical Project Leader, focussed on unique to graphene applications for MEMS devices.

Increasingly complex ultra-high frequency IC chips demand state-of-the-art RF characterization, and Philips Innovation Services offers on wafer device characterization with powerful functionality.

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