MEMS sensors

Our technology platform for micro- and nanotechnologies is very suitable for the manufacturing of various kinds of MEMS devices and sensors.

For example, our CirconFlex sensor platform is a basis for state-of-the-art sensors for measuring:

  • Fow
  • Pressure
  • Temperature
  • Acceleration

Several sensing modes can be combined into one sensor, if required, and opens up a path towards highly miniaturized and integrated devices.

We are able to use either rigid or flexible substrates and even can develop membrane-based sensors.

Check out our other MEMS applications

MEMS applications are many. Organ-on-a-chip for example, where a human organ is reproduced in its most elementary form: microelectromechanical systems device. Several applications stand out, because of their promise and our capabilities.

Relevant for you: MEMS & Micro Devices MEMS is our expertise

Sustainable competitive advantage through custom MEMS devices. Check out our services in the MEMS & Micro Devices key area of expertise.

News & events

Save the date! The next European MEMS & Sensors Summit will take place on 19-21 September 2018 in Grenoble, France.

Projects on ultrasound innovation awarded for future generation microfabrication technologies for ultrasound products and imaging catheters.

Presentation by technologist René Sanders about microfluidic device standardization and manufacturability at the Polymer Replication on Nanoscale conf.

Presentation by Dr. Jos Giesbers, Sr. Development Engineer & Technical Project Leader, focussed on unique to graphene applications for MEMS devices.

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