MEMS & Micro Devices
Custom MEMS to create sustainable competitive advantage
Driven to develop smaller, faster devices that have more computing power and memory capacity? When systems are getting smarter, the need for suitable MEMS sensors and actuators is getting bigger. When you have uncommon actuator or sensor specifications, and your MEMS device is not ready-made waiting for you on the shelf, then a custom MEMS device will get you the sustainable competitive advantage you need for you business.
Our MEMS & Micro Devices expertise
We design, develop and manufacture custom microelectromechanical systems (MEMS) and assemble micro devices. Our 140 experts working at the MEMS Foundry and Micro Devices Facility follow a phase-gated approach to demonstrate the feasibility and give proof of concept, develop the process to the required maturity level and manufacture your devices with the right quality.
Prototyping, process development and manufacturing
At our facilities we offer MEMS prototyping, MEMS process development, MEMS manufacturing, as well as Micro Devices services. We follow our qualified way of making prototypes, systematically developing your idea into a prototype or device according to your requirements.
We work with proven processes, methods and tools, making innovation work. We use a phase-gated approach, using design for excellence principles to address critical-to-quality parameters and new, critical processes. We do this in close cooperation with our customers. We strongly believe that robust integral design and quality is achieved in co-development with you.
What is MEMS technology?
Microelectromechanical systems, or MEMS, is a process technology used to create tiny integrated devices or systems that have both mechanical and electronic components. The functional elements of MEMS are for example: minitiaturized structures, sensors, actuators and microelectronics.
Our MEMS Process capabilities
- We deliver more than 15,000 wafers per year from our ISO 5, 6 and 7 class cleanroom (equivalent to 100 – 10,000 FED standard class)
- We offer the flexibility to work with materials ranging from Ag to Zn, including ‘CMOS-forbidden’ materials, alloys, dielectrics and polymers like parylene.
Download the process capabilities overview ›
MEMS Foundry and Micro Devices Facility working as one-stop shop
We offer both MEMS foundry and Micro devices assembly as a one-stop shop, which allows our partners to have one point of contact for efficient communication and project handling. It is pretty unique that the two entities can collaborate together, within 5km distance in Eindhoven. MEMS component & micro assembly can really be optimized for each other at Philips Innovation Services.
Philips Innovation Services operates a state-of-the-art 2650 m2 pure-play MEMS Foundry on the High Tech Campus in Eindhoven, the Netherlands. This MEMS Foundry is specialized in low to medium volume custom MEMS manufacturing. When off-the-shelf components do not meet your requirements, and you consider having a custom MEMS device especially made for you, you come to us.
At the Micro Devices Facility The Greenhouse located at Strijp in Eindhoven, the Netherlands, we have over 40 years of experience. We deliver key microsystem modules, integrated into devices, for the medical & high-tech markets. Our customers typically require a complex combination of technologies to obtain new advanced functions at small scales.
Capabilities for MEMS & Micro Devices
- ASIC design
- Assembly: die attach, wire-bonding, stud bumping, ACF bonding, pick & place and soldering
- Concept creation and technology scoping
- Continuous improvement
- Cpk analysis and yield improvement
- DfX: Design for eXcellence
- Functional testing
- Inspection and failure analysis: solder paste inspection, 3D automated optical, X-ray
- Mentor graphics lay-outing
- Risk management, FMEA
- Supply chain management
- TPD/DMR product documentation management
- Verification & validation of process and tooling