MEMS & Micro Devices


What is MEMS technology? 

Micro-Electro-Mechanical Systems, or MEMS,  is a process technology used to create tiny integrated devices or systems that have both mechanical and electronic components. The functional elements of MEMS are for example: minitiaturized structures, sensors, actuators and microelectronics. More about MEMS applications >. 

Custom MEMS devices

Are you contemplating the use of MEMS devices in your system in order to create a sustainable competitive advantage? When your current solution just doesn’t seem to do the trick, a custom MEMS device might be worthwhile investigating. How feasible would a custom MEMS device be for you? We design, develop and manufacture custom microelectromechanical systems (MEMS) and assemble Micro devices.


About our MEMS & Micro Devices expertise

When you need custom MEMS & Micro Devices for you system, you can rely on our experts to really understand your requirements. Our 140 experts working at the MEMS Foundry and Micro Devices Facility follow a phase-gated approach to demonstrate the feasibility and give proof of concept, develop the process to the required maturity level and manufacture your devices with the right quality.

Sustainable competitive advantage

Are you driven to develop smaller, faster devices that have more computing power and memory capacity? When systems are getting smarter, the need for suitable MEMS sensors and actuators is getting bigger. When you have uncommon actuator or sensor specifications, and your MEMS device is not ready-made waiting for you on the shelf, then a custom MEMS device will get you the sustainable competitive advantage you need for you business.


Prototyping, process development and production

At our facilities we offer MEMS prototyping, MEMS process development, MEMS manufacturing, as well as Micro Devices services. We follow our qualified way of making prototypes, systematically developing your idea into a prototype or device according to your requirements.

We work with the proven processes, methods and tools to accelerate your innovation. We use a phase-gated approach, using design for excellence principles to address critical-to-quality parameters and new, critical processes. We do this in close cooperation with our customers. We strongly believe that robust integeral design and quality is achieved in co-development with you.

Contact us about MEMS & Micro Devices services

MEMS Foundry

There are many uses for a MEMS device in a system. When we talk about MEMS applications, typically the market and application knowledge comes from the customer. What we bring is the technology and methodology to accelerate innovation and realize ideas.
As a result, we work across a wide range of applications and markets, and we have many MEMS application examples we want to share with you.

Read more about our pure-play MEMS Foundry

Micro Devices Facility

At the Micro Devices Facility The Greenhouse we have over 40 years of experience. We team up with you to make your product within the critical time path, reacting fast and flexible on new insights. We assure integral coupling with supply chain and manufacturing activities. And we use industrial production equipment. Assembly services are industrial PCBA prototypingassembly of high-end PCBAs, and interconnect architecture & prototyping.

Micro Devices Facility

Case - creating nanowire technology for solar applications

Sol Voltaics AB provides next-generation solar nanotechnology solutions that can significantly enhance solar panel efficiency.

High quality wafers and shortened time to market were the main goals to partner up. We helped Sol Voltaics AB by developing a robust process flow to manufacture patterned substrates.

Their application is quite unique, therefore we needed to adopt specific requirements to meet those requests and specifications.

< Watch the video to see how

MEMS devices and micro assembly

Capabilities for
MEMS & Micro Devices

  • ASIC design
  • Assembly: die attach, wire-bonding, stud bumping, ACF bonding, pick & place and soldering
  • Concept creation and technology scoping
  • Continuous improvement
  • Cpk analysis and yield improvement
  • DfX: Design for eXcellence
  • Functional testing
  • Inspection and failure analysis: solder paste inspection, 3D automated optical, X-ray
  • Mentor graphics lay-outing
  • Risk management, FMEA
  • Supply chain management
  • TPD/DMR product documentation management
  • Verification & validation of process and tooling

MEMS Foundry key application areas

New digital printing application areas, breakthrough technology & cost advantage with custom thin-film MEMS inkjet printheads.

Manufacturing of devices like meshes, nozzles, jets, channels, barriers and complete functional chips.

Breakthrough applications for ultrasound, complementing conventional technology with advantages.

Lithography down to 0.5 μm feature size; material deposition by sputtering, evaporation, LP and PECVD, and both (D)RIE and wet etching.

Micro Devices Facility key application areas

photonic applications

Micro-assembly for photonic applications

Micro Devices Facility for ultra-precise alignment and fixation of photonic and optoelectronic devices, from prototyping to volume production for photonic applications.

Read more ›

rf applications

Micro-assembly for RF applications

RF application design: modeling & simulation, layout, thermal management, EMC, antenna design, signal integrity, wireless reliability, functional testing.

Read more ›

What our customers value

Océ – For the next generation in the printing process we are developing a fluidic MEMS device.

Elesta – Our main innovation challenges were the following: how to improve reliability, accuracy and sensitivity of the encoder.

Sol Voltaics AB – Our application is quite unique, so we had some specific requirements.

Philips Healthcare (USA) – The diversity of the skills sets resulted in finishing the project much faster.

Get more information about our MEMS & Micro Devices expertise

MEMS foundry services information flyer

Get more information about our MEMS & Micro Devices expertise ›

MEMS devices and micro assembly video

Watch the video to get an impression of our MEMS & Micro Devices expertise ›

MEMS process capabilities

Download the specification sheet on all MEMS foundry process capabilities ›

Projects on ultrasound innovation awarded for future generation microfabrication technologies for ultrasound products and imaging catheters.

Presentation by technologist René Sanders about microfluidic device standardization and manufacturability at the Polymer Replication on Nanoscale conf.

Presentation by Dr. Jos Giesbers, Sr. Development Engineer & Technical Project Leader, focussed on unique to graphene applications for MEMS devices.

Increasingly complex ultra-high frequency IC chips demand state-of-the-art RF characterization, and Philips Innovation Services offers on wafer device characterization with powerful functionality.


MEMS Foundry Philips Innovation Services
High Tech Campus 4
5656 AE Eindhoven

Micro Devices Facility Philips Innovation Services
The Greenhouse
Kastanjelaan 400, building SFH
5616 LZ Eindhoven


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