A typical example of micro devices with high potential in for example analytical and healthcare applications are micro sieves.
Micro sieves consist of a thin film (inorganic) structure, containing pores of a specific size or size distribution, with a gross diameter of the pores ranging from 0.5 μm up to 50 – 100 μm.
As these are made by a lithographic process. Any shape, size, or combination is possible. Furthermore, these pores can be processed in thin inorganic films of sub-micron to micron thickness, or in full silicon or glass wafers.
Micro sieve application areas are:
- Particle and media filtering
- Vaporizing & nebulizing
- Support of samples for e.g. TEM applications
- Shaping of e-beams
Check out our other MEMS applications
MEMS applications are many. Organ-on-a-chip for example, where a human organ is reproduced in its most elementary form: microelectromechanical systems device. Several applications stand out, because of their promise and our capabilities.
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Presentation by Dr. Jos Giesbers, Sr. Development Engineer & Technical Project Leader, focussed on unique to graphene applications for MEMS devices.