Precision equipment pre-development

Your benefit

Fast, robust design & realization of equipment prototypes or ‘proof of technology’ set-ups. This enables process development and/or proof equipment functionality in an early phase of your (business) development.

We deliver

  • Proof of concept (demonstrator, demo tool)
  • Testing / verification / integration / support
  • Documentation / knowledge transfer

Our approach

Multidisciplinary project team from requirements to realization.


  • Lean development
  • Fast prototyping (HW & SW)


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Magnetic levitation stage with planar motor

28 Jun 2017

Get up-to-date on maglev stages with inverted planar motor technology. Mechatronics experts share knowledge about free-floating movers on a rotary stage.

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In the spotlight

Excellent dynamic isolation, no wear or lubricant contamination, very high accuracy high accelerations, easily incorporated in designs & easily extendable to multiple stages…

For one of our customers, a rotary stage is developed (see picture). Due to the strict performance requirements, and as a tradeoff with component costs, an elaborate calibration…

The Austria-based company IMS Nanofabrication chose Philips Innovation Services as partner to build a proof-of-concept system for their electron multi-beam Mask Exposure Tool (…

In systems where a cooling liquid is applied for heat removal and/ or thermal conditioning, the cooling liquid is commonly temperature controlled via an external reservoir.

You need a partner to take on part of your system development as an integral project, handling all aspects from concept, design up to turn-key realization, delivery and verification, based on your requirements or functional specification? Pleased to meet you!

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