- Design and fabrication of a MEMS mirror for Miniature Laser Projection
| Author |
René Sanders, Diederik van Lierop, Boudewijn de Jong, Toon Kuijpers, Herman Soemers
Philips Applied Technologies, Eindhoven, The Netherlands |
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Paper |
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Invited talk at Photonics West, January 2009 |
| Abstract |
For miniature laser projection displays the laser beam is swept very fast back and forth with a MEMS mirror. This paper presents an innovative design for such a MEMS mirror. Both the dynamical behavior and manufacturability have been improved. We designed a process based upon industrially proven process steps to accurately control critical parameters and fabricated a mirror consisting of: cantilever beams, out-of-plane support beams and a rhombus shaped enforcement structure. Measurements show a well defined resonant mode of operation at 23.5 kHz while suffering from only little parasitic resonance modes. This mirror can now be mass-produced at low costs. |
- Best practices in applying TRIZ at Philips Royal Electronics TRIZFuture Conference 2009
| Author |
Christoph Dobrusskin MDes (RCA), MBA
Philips Applied Technologies, Industry Consulting
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Paper |
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TRIZFuture Conference 2009 - Timisoara, Romania, November 4th-6th 2009 - innovative product design |
| Abstract |
In the past seven years we, at Philips Applied Technologies have consistently used TRIZ in our innovation process for various businesses at Philips as well as for external parties, and particularly in workshop settings, in which participants are not generally trained in the use of TRIZ. Initially we have tried to use elements of TRIZ directly in the definition and ideation phases, but have met with some difficulties. We have subsequently developed a different way of integrating the systematics of TRIZ within the structure of our project settings, and based on our experience we will show how we integrate TRIZ in our innovation process, present our learnings and links to other innovation tools. |
- Mechatronics: Small is beautiful (but big is nice as well)
| Author |
H.M.J. Soemers
Philips Applied Technologies
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Paper |
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| Abstract |
MEMS technology matches very well the ongoing trend towards further miniaturization. Evidence of this are micro embodiments of mechatronic devices like scanning mirrors, data storage systems and inkjet heads are. This paper deals a.o. with mechatronic and precision design principles that apply to microsystems. These deviate strongly from what is possible in macro systems given the scaling laws and processing possibilities. To stress that the area of mechatronic design is getting wider and that ‘big mechatronics’ enables ‘small mechatronics’, examples belonging to the micro domain are followed by an example of a mechatronic systems with relatively large size and extreme precision as will be found in future lithography tools. |
- Experimentally Validated Multivariable Feedback Controller Design for High-Precision Wafer Stage
| Author |
March van de Wal, Gregor van Baars, Frank Sperling
Philips Applied Technologies
Okko Bosgra
Delft University of Technology |
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Paper |
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- Evaluation of "classic" creativity tools and TRIZ tools in ideation workshops
| Author |
Christoph Dobrusskin MDes(RCA), MBA
Philips Applied Technologies, Industry Consulting
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| Download |
Paper |
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| Abstract |
For a number of years we have consistently used TRIZ in our innovation process for Philips as well as for external clients, and particularly in workshop settings. To better be able to determine which creative technique is best suited to solve a given problem, we have started to systematically investigate how the workshop participants experience the various creative techniques that we employ. Based on this investigation first conclusions will be shown on how selected TRIZ tools are experienced in comparison to other creative techniques. |
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